Ushio to unveil thermal & surface processing, lithography developments at SEMICON

LED Heating Module

Ushio’s new LED-based, instantaneous heating modules are currently in development for etching, deposition, and ion implantation applications. The result is a compact, LED heating module that boasts rapid and accurate temperature control over a specified area.

Direct Imaging (DI)

ADTEC Engineering, an Ushio subsidiary, is in the process of launching their DE-2 and DE-8 exposure systems; adding Direct Imaging (DI) exposure for integrated circuit (IC) substrates and printed circuit board (PCB) processing to the Ushio portfolio. A partnership between ADTEC and Deca has secured optional compatibility with Deca’s Adaptive Patterning™.

UX-4 full-field projection exposure mask aligner

The UX-4 Series Aligner improves production of micro-electromechanical systems (MEMS), powerful LEDs, and power devices. Developed by the Ushio Inc. R&D team, UX-4 is equipped with a high-quality lens for a large depth of field. Capable of full-field wafer exposure, up to 200 mm in diameter, UX-4 promotes improved productivity, while reducing manufacturing cost.

LPP

Ushio’s engineers have reached a critical stage in the development of the brightest-ever, laser-produced plasma (LPP) EUV light source for lithography inspection and medical applications. Compact, easy-to-maintain, and developed by Ushio Germany with Fraunhofer ILT, a liquid tin-coated rotating disc target and a solid-state nanosecond laser combine to create EUV photons. Designed to run at up to 50 kHz, current testing runs at 20 kHz; additionally, plans feature a debris filter and collector to bring EUV light to the intermediate focus point.

Ushio’s wider portfolio for thermal processes, lithography, and surface treatment

Aside from the new products mentioned above, Ushio will also be bringing along representatives to share their knowledge on: SH Lamps; Solid State Lighting; Linear and Bent IR Lamps; IR Twin Tube Lamps; Excimer: Hyper V-ST & 222 nm exposure.

As the world of face-to-face meetings is making a comeback, the Ushio team looks forward to welcoming visitors to SEMICON Europa, hall B1, booth B1818. In the meantime, Ushio, the superior light solution supplier for semiconductor, is waiting to discuss your needs at www.ushio.eu/contact.